Chi, P.
, Simons, D.
and Roitman, P.
(1991),
Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry, Surface and Interface Analysis
(Accessed April 3, 2026)
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Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry
Published
Author(s)
, ,
Citation
Surface and Interface Analysis
Volume
17
Pub Type
Journals
Citation
Issues
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Created December 30, 1991, Updated October 12, 2021