Electrical Characterization of Molecular Monolayers Formed by Direct Attachment to Si

Published

December 4, 2003

Author(s)

Curt A. Richter, Christina A. Hacker, Lee J. Richter

Abstract

We present the results of studies of solution-based attachment of long-chain aliphatic molecules to hydrogen-terminated Si surfaces formed to pursue the electrical properties of organic monolayers. Direct attachment of organic molecules to the silicon surface is of increasing importance for emerging molecular electronics applications as devices incorporating molecules chemically bonded to silicon are amenable to integration with existing Si processing techniques. To investigate the quality of these organic monolayers formed on Si, they were physically and chemically characterized with infrared spectroscopy, spectroscopic ellipsometry, and contact angle measurements. Current-voltage and capacitance-voltage measurements were obtained from a metal-organic-silicon test structure fabricated by post-monolayer metal deposition. The effect of differing alkane chain length on the electrical properties was measured.

Proceedings Title

Workbook of the IEEE Semiconductor Interface Specialist Conference

Conference Dates

December 4-6, 2003

Conference Location

Arlington, VA

Conference Title

IEEE Semiconductor Interface Specialist Conference

Pub Type

Conferences

Keywords

aliphatic, capacitance-voltage, direct attachement, molecular electronics, organic monolayers, silicon

Citation

Richter, C. , Hacker, C. and Richter, L. (2003), Electrical Characterization of Molecular Monolayers Formed by Direct Attachment to Si, Workbook of the IEEE Semiconductor Interface Specialist Conference, Arlington, VA (Accessed October 10, 2025)