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The Relationship Between Accelerating Voltage and Electron Detection Modes to Linewidth Measurement in an SEM
Published
Author(s)
Michael T. Postek, William J. Keery, Robert D. Larrabee
Citation
Journal of Scanning Microscopy
Volume
10
Pub Type
Journals
Citation
Postek, M.
, Keery, W.
and Larrabee, R.
(1988),
The Relationship Between Accelerating Voltage and Electron Detection Modes to Linewidth Measurement in an SEM, Journal of Scanning Microscopy
(Accessed May 5, 2024)