Gaitan, M.
(1995),
MEMS in Standard CMOS VLSI Technology, Proc., Twenty-Ninth Annual Conference on Information Science and Systems, Baltimore, MD
(Accessed January 16, 2026)
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MEMS in Standard CMOS VLSI Technology
Published
Author(s)
Proceedings Title
Proc., Twenty-Ninth Annual Conference on Information Science and Systems
Conference Location
Baltimore, MD
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Conferences
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Created December 31, 1995, Updated February 17, 2017