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PUBLICATIONS

Industrial Uses of STM and AFM

Published

Author(s)

Theodore V. Vorburger, John A. Dagata, G. Wilkening, K Iizuka

Abstract

We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applications on-line in manufacturing. We also discuss the role of metrology for certain applications and briefly review many other types of SPMs besides STM and AFM. We conclude by emphasizing ultra-precision positioning, nanofabrication, and biomedical applications as important future directions in the field.
Citation
Annals CIRP
Volume
47(2)
Pub Type
Journals

Keywords

atomic force microscopy (AFM), Scanning probe microscopy (SPM), Scanning tunneling microscopy (STM)
Metrology and Manufacturing

Citation

Vorburger, T. , Dagata, J. , Wilkening, G. and Iizuka, K. (1997), Industrial Uses of STM and AFM, Annals CIRP (Accessed October 11, 2025)

Issues

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Created December 31, 1996, Updated October 12, 2021
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