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PUBLICATIONS

Linewidth Intercomparison on a Polysilicon Sample

Published

Author(s)

John S. Villarrubia, Andras Vladar, Michael T. Postek, Ronald G. Dixson

Abstract

Not available.
Citation
ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary
Pub Type
Others

Keywords

AFM, atomic force microscopy, critical dimension metrology, library-based metrology, linewidth metrology, scanning electron microscopy, SEM
Manufacturing and Metrology

Citation

Villarrubia, J. , Vladar, A. , Postek, M. and Dixson, R. (2000), Linewidth Intercomparison on a Polysilicon Sample, ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary (Accessed October 12, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created November 1, 2000, Updated February 19, 2017
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