Germer, T.
and Asmail, C.
(1999),
Polarization of Light Scattered by Microrough Surfaces and Subsurface Defects, Journal of the Optical Society of America A-Optics Image Science and Vision (Accessed May 1, 2026)
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Polarization of Light Scattered by Microrough Surfaces and Subsurface Defects
Published
Author(s)
,
Abstract
The polarization of light scattered into directions out of the plane of incidence for 532 nm light incident at 45 with p-polarization was measured from rough silicon, rough titanium nitride, polished fused silica and glass ceramic, and ground and incompletely polished black glass. Models for polarized light scattering from microroughness, subsurface defects, and facets are reviewed. The measurements demonstrate the validity of the models and the utility of polarized light scattering measurements for distinguishing between roughness and defects.Citation
Journal of the Optical Society of America A-Optics Image Science and Vision
Volume
16
Issue
No. 6
Pub Type
Journals
Keywords
bidirectional ellipsometry, microroughness, polarimetry, scatter, subsurface defects, surfaces
Citation
Issues
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Created June 1, 1999, Updated February 17, 2017