NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Wavelet Transform Approach to the Analysis of Specular X-Ray Reflectivity Curves

Published

Author(s)

I R. Prudnikov, R J. Matyi, R Deslattes

Abstract

A method for analyzing X-ray reflectivity curves from multilayered structures with interfacial roughness using a wavelet transform approach has been developed. By using this approach, we have been able (1) to extract the contribution of a particular rough interface to a specular reflectivity curve, and (2) to determine the root-mean-square amplitude of the roughness of a particular interface independently of the other interfaces in the multilayered structure from the specular reflectivity data. Analytical procedures that allow the interpretation of the wavelet coefficients obtained from specular reflectivity curves have been developed. This approach has been successfully applied to experiment reflectivity curves obtained from Cu/Ta, Ta2O5/Ta, and Ta2O5/Ta2 N bilayer structures.
Citation
Journal of Applied Physics
Volume
90
Issue
No. 7
Pub Type
Journals

Keywords

interface roughness, multilayer structures, wavelet transform, X-ray specular reflection

Citation

Prudnikov, I. , Matyi, R. and Deslattes, R. (2001), Wavelet Transform Approach to the Analysis of Specular X-Ray Reflectivity Curves, Journal of Applied Physics (Accessed October 27, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created September 30, 2001, Updated October 12, 2021
Was this page helpful?