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PUBLICATIONS

Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures

Published

Author(s)

Wen-Li Wu, Eric K. Lin, Q Lin, M Angelopolous
Conference Location
Gaithersburg, MD
Conference Title
Characterization and Metrology for ULSI Technology: 2000 International Conference
Pub Type
Conferences

Download Paper

Local Download

Keywords

critical dimension, electronic materials, line edge roughness, lithography, microstructure, nanofabrication, scattering, small angle neutron scattering, thin films

Citation

Wu, W. , Lin, E. , Lin, Q. and Angelopolous, M. (2000), Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures, Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853678 (Accessed October 22, 2025)

Issues

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Created January 1, 2000, Updated February 17, 2017
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