Hurly, J.
(1998),
Properties of Process Gases Determined Accurately with Acoustic Techniques, International Conference on Characterization and Metrology of ULSI Technology, Gaithersburg, MD
(Accessed February 22, 2026)
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Properties of Process Gases Determined Accurately with Acoustic Techniques
Published
Author(s)
Proceedings Title
International Conference on Characterization and Metrology of ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD
Conference Title
Proceedings of International Conference on Characterization and Metrology of ULSI Technology
Pub Type
Conferences
Citation
Issues
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Created March 23, 1998, Updated February 17, 2017