NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines

Published

Author(s)

Uwe Arz, Hartmut Grabinski, Dylan Williams

Abstract

This work investigates the broadband propagation characteristics of transmission lines fabricated on silicon substrates of different conductivities. We compare calculations to measurements and examine the sensitivity of the frequency-dependent line parameters to substrate conductivity.
Proceedings Title
ARFTG Conference Digest-Spring, 54th (Volume: 36)
Volume
36
Conference Dates
December 2-3, 1999
Conference Location
Atlanta, GA, US
Conference Title
54th ARFTG Conference Digest
Pub Type
Conferences

Download Paper

https://doi.org/10.1109/ARFTG.1999.327364
Local Download

Keywords

electromagnetic simulation, equivalent-circuit parameters, measurement, silicon substrate effect, transmission line
Electrical / electromagnetic metrology

Citation

Arz, U. , Grabinski, H. and Williams, D. (1999), Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines, ARFTG Conference Digest-Spring, 54th (Volume: 36), Atlanta, GA, US, [online], https://doi.org/10.1109/ARFTG.1999.327364, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24545 (Accessed October 2, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created November 30, 1999, Updated October 12, 2021
Was this page helpful?