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PUBLICATIONS

Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula

Published

Author(s)

Thomas A. Germer
Proceedings Title
Characterization and Metrology for ULSI Technology: 2000 International Conference
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, WA
Conference Title
Proc. AIP 550
Pub Type
Conferences

Citation

Germer, T. (2001), Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula, Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, WA (Accessed October 16, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 2001, Updated February 17, 2017
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