Germer, T.
, Seiler, D.
, Bullis, W.
, Diebold, A.
, Mcdonald, R.
and Shaffner, T.
(1998),
Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection, Characterization and Metrology for ULSI Technology
(Accessed April 30, 2024)
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Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection
Published
Author(s)
, D G. Seiler, W M. Bullis, A C. Diebold, R Mcdonald, T J. Shaffner
Citation
Characterization and Metrology for ULSI Technology
Volume
449
Pub Type
Journals
Citation
Created January 1, 1998, Updated February 17, 2017