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PUBLICATIONS

Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie

Published

Author(s)

Heather J. Patrick, R Attota, Thomas A. Germer, M Stocker, R M. Silver
Citation
Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE
Volume
6152
Pub Type
Journals

Citation

Patrick, H. , Attota, R. , Germer, T. , Stocker, M. and Silver, R. (2006), Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie, Metrology Pages Inspection Pages and Process Control for Microlithography XX SPIE (Accessed October 10, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 1, 2006, Updated February 17, 2017
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