Chemical mapping of patterned polymer photoresists by near-field infrared microsopy

B Dragnea; Jan Preusser; J M. Szarko; L A. McDonough; S R. Leone

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PUBLICATIONS

Chemical mapping of patterned polymer photoresists by near-field infrared microsopy

Published

January 1, 2001

Author(s)

B Dragnea, Jan Preusser, J M. Szarko, L A. McDonough, S R. Leone

Citation

Proc ICSFS-10 Appl Surf Sci

Volume

175

Pub Type

Journals

Citation

Dragnea, B. , Preusser, J. , Szarko, J. , McDonough, L. and Leone, S. (2001), Chemical mapping of patterned polymer photoresists by near-field infrared microsopy, Proc ICSFS-10 Appl Surf Sci (Accessed May 17, 2026)

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Created December 31, 2000, Updated October 12, 2021

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