Summary of ISO/TC 201 Standard: XIII. ISO 18114:2003 - Surface Chemical Analysis - Secondary Ion Mass Spectrometry - Determination of Relative Sensitivity Factors From Ion-Implanted Reference Materials

Published

March 1, 2006

Author(s)

David S. Simons

Abstract

Ion-implanted materials are commonly used in secondary-ion mass spectrometry for the calibration of instruments. This international Standard was prepared to provide a uniform method for determining the relative sensitivity factor (RSF) of an element in a specified matrix from an ion-implanted reference material, and to show how the concentration of the element in a different sample of the same matrix material can be determined. In this standard, terms are defined and a formula is given for calculating an isotopic RSF for a particular element-matrix combination from a SIMS depth profile of an ion-implanted external standard. Options are provided for cycle-by-cycle normalization to a matrix reference species or normalization to a single average value of a matrix signal. Another formula is given for using this RSF to quantify the concentration of the same element as a function of depth in a different sample of the same matrix material. Requirements of ion-implanted reference materials for use with this method are specified, as are the contents of a test report when an RSF is determined by this method.

Citation

Surface and Interface Analysis

Volume

38

Issue

No. 3

Pub Type

Journals

Keywords

ion implantation, reference material, relative sinsitivity factor, RSF, SIMS

Citation

Simons, D. (2006), Summary of ISO/TC 201 Standard: XIII. ISO 18114:2003 - Surface Chemical Analysis - Secondary Ion Mass Spectrometry - Determination of Relative Sensitivity Factors From Ion-Implanted Reference Materials, Surface and Interface Analysis (Accessed October 16, 2025)