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PUBLICATIONS

Round Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS

Published

Author(s)

David S. Simons, Richard M. Lindstrom
Citation
Applied Surface Science
Volume
252
Issue
19
Pub Type
Journals

Keywords

aresenic, INAA, LEXES, matrix normalization, SIMS
Analytical chemistry, Materials characterization and Spectroscopy

Citation

Simons, D. and Lindstrom, R. (2006), Round Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS, Applied Surface Science (Accessed October 13, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created July 30, 2006, Updated February 19, 2017
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