Lee, K.
(1992),
A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes, Proc. Symposium on Electrochemical Microfabrication, Pennington, NJ (Accessed May 6, 2026)
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A Lithium-drift Technique for Making Submicrometer Thick Silicon Membranes
Published
Author(s)
Proceedings Title
Proc. Symposium on Electrochemical Microfabrication
Conference Location
Pennington, NJ
Pub Type
Conferences
Citation
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Created October 1, 1992, Updated February 19, 2017