Summary Report: Second Workshop in Industrial Applications of Scanned Probe Microscopy

Published

January 1, 1995

Author(s)

John A. Dagata, A Diebold, C Shih, R Colton

Abstract

The Second Workshop on Industrial Applications of Scanned Probe Microscopy (IASPM) was held at the National Institute of Standards and Technology (NIST) Gaithersburg on May 2-3, 1995. The meeting, co-sponsored by NIST, SEMATECH, the American Society for Testing and Materials (ASTM) E42.14 Subcommittee, and the Manufacturing Science and Technology Group of the American Vacuum Society (AVS), was attended by approximately one hundred scanned probe microscopy (SPM) users, suppliers, and researchers from industry, government, and academia. The workshop featured over fifty industry overviews and technical presentations of SPM-based research and development (R&D) activities arranged into three oral focus sessions and poster presentations. A fourth session was devoted to progress on SPM measurement standardization and tool development issues which have occurred since the previous workshop.

Citation

NIST Interagency/Internal Report (NISTIR) - 5752

Report Number

5752

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Citation

Dagata, J. , Diebold, A. , Shih, C. and Colton, R. (1995), Summary Report: Second Workshop in Industrial Applications of Scanned Probe Microscopy, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed October 27, 2025)