Nanoscale elastic-property measurements and mapping using atomic force acoustic microscopy methods

Published

June 1, 2005

Author(s)

Donna C. Hurley, M Kopycinski-Muller, Anthony B. Kos, R.H. Geiss

Abstract

We describe a dynamic atomic force microscopy (AFM) method for measuring the elastic properties of surfaces, thin films and nanostructures at the nanoscale. Our approach is based on atomic force acoustic microscopy (AFAM) techniques and involves the resonant modes of the AFM cantilever in contact mode. From the frequencies of the resonant modes, the tip-sample contact stiffness κ* can be calculated. Values for elastic properties such as the indentation modulus M can be determined from κ* with appropriate contact-mechanics models. We present the basic principles of AFAM and explain how it can be used to measure local elastic properties with a lateral spatial resolution of tens of nanometres. Quantitative results for a variety of films as thin as 50 nm are given to illustrate our methods. Studies related to measurement accuracy involving the effects of film thickness and tip wear are also described. Finally, we discuss the design and use of electronics to track the contact-resonance frequency. This extension of AFAM fixed-position methods will enable rapid quantitative imaging of nanoscale elastic properties.

Citation

Measurement Science & Technology

Volume

16

Pub Type

Journals

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Keywords

atomic force acoustic microscopy, atomic force microscopy, elastic properties, nanomechanics

Citation

Hurley, D. , Kopycinski-Muller, M. , Kos, A. and Geiss, R. (2005), Nanoscale elastic-property measurements and mapping using atomic force acoustic microscopy methods, Measurement Science & Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32117 (Accessed October 20, 2025)