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PUBLICATIONS

Mass Flow Research and Standards: NIST Workshop Results

Published

Author(s)

Robert F. Berg, David S. Green, G E. Mattingly

Abstract

A recent workshop at the National Institute of Standards and Technology (NIST) identified research and standards that will benefit users and manufacturers of mass flow controllers and related equipment. The workshop identified problems with flow measurement in the semiconductor industry and proposed 21 tasks directed at those problems. Seven tasks were strongly recommended.
Citation
Future Fab International
Volume
10
Pub Type
Journals

Download Paper

Local Download

Keywords

flow measurement, mass flow controller, NIST
Chemistry, Metrology, Flow metrology and rheology and Pressure and vacuum metrology

Citation

Berg, R. , Green, D. and Mattingly, G. (2001), Mass Flow Research and Standards: NIST Workshop Results, Future Fab International, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830708 (Accessed October 10, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created July 1, 2001, Updated February 19, 2017
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