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PUBLICATIONS

Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers

Published

Author(s)

Robert G. Downing, David S. Simons, George P. Lamaze, Richard M. Lindstrom, Robert R. Greenberg, Rick L. Paul, Susannah B. Schiller, William F. Guthrie
Citation
Journal of Vacuum Science and Technology
Pub Type
Journals

Citation

Downing, R. , Simons, D. , Lamaze, G. , Lindstrom, R. , Greenberg, R. , Paul, R. , Schiller, S. and Guthrie, W. (2007), Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers, Journal of Vacuum Science and Technology (Accessed October 23, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created November 1, 2007, Updated February 17, 2017
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