Gaitan, M.
(2013),
ITRS Chapter: MEMS, Future Fab International, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913266
(Accessed April 19, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
ITRS Chapter: MEMS
Published
Author(s)
Abstract
The ITRS has organized a MEMS Technology Working Group (TWG), which has developed a new chapter on MEMS for its 2011 report. The report focuses on MEMS technologies associated with mobile Internet devices, such as smartphones and tablet computers. These applications represent the fastest growing segment in MEMS manufacturing, according to 2011 market forecasts by iSuppli, Yole Développement and SEMI.Citation
Future Fab International
Volume
44
Pub Type
Journals
Download Paper
Keywords
MEMS, Technology Roadmapping, Inertial, Sensors, Microelectromechanical Systems
Citation
Created January 30, 2013, Updated June 12, 2017