NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Band Offset Determination of Atomic-Layer-Deposited Al2O3 and HfO2 on InP by Internal Photoemission and Spectroscopic Ellipsometry

Published

Author(s)

Kun Xu, Oleg A. Kirillov, David J. Gundlach, Nhan V. Nguyen, Pei D. Ye, Min Xu, Lin Dong, Hong Sio

Abstract

Band offsets at the interfaces of n- and p-type InP ((100) and (111)A) and atomic-layer-deposited (ALD) Al2O3 were measured with internal photoemission and spectroscopic ellipsometry. Similarly, the band offsets at the interface of semi-insulating InP (100) and ALD HfO2 were also determined. The barrier between the top of InP valence band and the bottom of Al¬2O3 conduction band is found to be 3.44 eV for p-type material and 3.53 eV for n-type. The photoemission thresholds are found to be sensitive to the annealing conditions, and blue shifts are observed after annealing. The offsets from InP valence band to the HfO2 conduction band for the HfO2/InP stack are found to be 3.89 eV, and we observed an increase of 60 meV if the interface is passivated.
Citation
Journal of Applied Physics
Volume
113
Pub Type
Journals

Download Paper

DOI Link

Keywords

high-k, InP, internal photoemission, spectroscopic ellipsometry, Al2O3, HfO2
Semiconductors and Polymers

Citation

Xu, K. , Kirillov, O. , Gundlach, D. , Nguyen, N. , Ye, P. , Xu, M. , Dong, L. and Sio, H. (2013), Band Offset Determination of Atomic-Layer-Deposited Al2O3 and HfO2 on InP by Internal Photoemission and Spectroscopic Ellipsometry, Journal of Applied Physics, [online], https://doi.org/10.1063/1.4774038 (Accessed October 11, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 9, 2013, Updated November 10, 2018
Was this page helpful?