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Microwave Characterization of Flip-Chip MMIC Components
Published
Author(s)
Roger Marks, Jeffrey A. Jargon, C. K. Pao, C. P. Wen, Y. C. Shih
Abstract
Abstract: We apply custom calibration standards and software to the accurate on-wafer measurement of MIM capacitors and spiral inductors on flip-chip coplanar-waveguide MMICs. We suggest equiva1lent circuit models and document their deficiencies. The results are applicable to the development of an accurate CAD database.
Marks, R.
, Jargon, J.
, Pao, C.
, Wen, C.
and Shih, Y.
(1995),
Microwave Characterization of Flip-Chip MMIC Components, Proc., 1995 Electronic Components and Tech. Conf., Las Vegas, NV, [online], https://doi.org/10.1109/ECTC.1995.514406
(Accessed October 18, 2025)