Hodges, J.
and Scace, G.
(2006),
Developing advanced humidity standards to measure trace water vapor in specialty gases, Micro
(Accessed July 1, 2025)
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Developing advanced humidity standards to measure trace water vapor in specialty gases
Published
Author(s)
,
Abstract
We describe primary thermodynamic standards for trace humidity generation maintained at NIST. Also, a discussion of NIST calibration services providing traceability of transfer standards to NIST primary standards is presented. Applications to the metrology relevant to the production and delivery of high-purity specialty gases for semiconductor manufacturing are discussed.Citation
Micro
Volume
24
Pub Type
Journals
Keywords
humidity
Citation
Issues
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Created January 1, 2006, Updated February 19, 2017