Mittal, S.
, Adachi, K.
, Frattini, N.
, Urmey, M.
, Lin, S.
, Emser, A.
, Metzberger, C.
, Talamo, L.
, Dickson, S.
, Carlson, D.
, Papp, S.
, Regal, C.
and Lehnert, K.
(2024),
Annealing reduces SI<sub>3</sub>N<sub>4</sub> microwave-frequency dielectric loss in superconducting resonators, Physical Review Applied, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957253
(Accessed February 22, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Annealing reduces SI3N4 microwave-frequency dielectric loss in superconducting resonators
Published
Author(s)
Sarang Mittal, Kazemi Adachi, Nicholas E. Frattini, Maxwell Urmey, S-X Lin, Alec Emser, C Metzberger, L Talamo, S. Dickson, D. Carlson, Scott Papp, CINDY REGAL,
Citation
Physical Review Applied
Volume
21
Pub Type
Journals
Download Paper
Keywords
silicon nitride, superconducting resonators, two-level systems
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created May 22, 2024, Updated February 20, 2026