Josell, D.
, Romano, L.
and Jefimovs, K.
(2025),
Bottom-up Gold Filling of Sub-Micrometer Wide Trenches, Journal of the Electrochemical Society, [online], https://doi.org/10.1149/1945-7111/adc493, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959494
(Accessed May 14, 2025)
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Bottom-up Gold Filling of Sub-Micrometer Wide Trenches
Published
Author(s)
, Lucia Romano, Konstantins Jefimovs
Abstract
A 〖Bi〗^(3+)-stimulated Au electrodeposition process in slightly alkaline 〖Na〗_3 Au(〖SO〗_3 )_2+〖Na〗_2 〖SO〗_3 electrolytes has been previously demonstrated for void-free bottom-up filling of progressively deeper and higher aspect trenches in gratings for advanced X-ray imaging technologies. The present work extends this bottom-up Au filling phenomenon to improve filling of small trenches. In particular, electrolytes are examined to reduce passive deposition on the sidewalls that makes filling of small, rather than high aspect ratio, features problematic. Improved Au fill in trenches as narrow as 0.5 m in width is detailed.Citation
Journal of the Electrochemical Society
Volume
172
Pub Type
Journals
Download Paper
Keywords
gold electrodeposition, gratings, imaging, superconformal
Citation
Issues
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Created April 3, 2025, Updated May 13, 2025