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Colton Dudley (Fed)

Publications

Harnessing the extreme ultraviolet for critical dimension metrology

Author(s)
Bryan Barnes, Purnima P. Balakrishnan, John Burnett, Aaron Chew, Colton Dudley, Thomas Germer, Steven Grantham, Stephanie Moffitt, Eric Shirley, Martin Sohn, Daniel Sunday
The semiconductor industry has long adopted visible and ultraviolet wavelengths for optical critical dimension (OCD) measurements. Decreasing feature sizes...
Created January 14, 2025
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