Marshall, J.
(2001),
MEMS length and strain measurements using an optical interferometer:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6779 (Accessed April 30, 2026)
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MEMS length and strain measurements using an optical interferometer:
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- NIST IR 6779
Report Number
NIST IR 6779
Pub Type
NIST Pubs
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Created January 1, 2001, Updated February 19, 2025