@misc{1141596,
  author = {J C Marshall},
  title = {MEMS length and strain measurements using an optical interferometer:},
  year = {2001},
  month = {2001-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6779},
  language = {en},
}