Croarkin, C.
(1982),
Measurement assurance for dimensional measurements on integrated-circuit photomasks:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.TN.1164
(Accessed May 9, 2025)
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Measurement assurance for dimensional measurements on integrated-circuit photomasks:
Published
Author(s)
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- NBS TN 1164
Report Number
NBS TN 1164
Pub Type
NIST Pubs
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Created January 1, 1982, Updated May 19, 2023