TY - GEN AU - Croarkin, Carroll C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1982-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.TN.1164 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1982 TI - Measurement assurance for dimensional measurements on integrated-circuit photomasks: ER -