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Purnima Balakrishnan (Fed)

Publications

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent...

Evidence of Antiferromagnetism in Ultrathin Metallic (111)-Oriented LaNiO3 Films

Author(s)
Margaret Kane, Purnima P. Balakrishnan, Okan Koksal, Megan Holtz, Andreas Suter, Michael R. Fitzsimmons, Chao-Yao Yang, Christoph Klewe, Paige Quarterman, Timothy R. Charlton, Andrew Herzing, Zaher Salman, Thomas Prokscha, Rossitza Pentcheva, Alexander Grutter, Yuri Suzuki
Antiferromagnets with exotic spin textures promise low-power spintronic devices with extremely high operating frequencies and resistance to external...
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Data and Software Publications

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan M Barnes, Aaron Chew, Nicholas W Jenkins, Yunzhe Shao, Martin Y Sohn, R Joseph Kline, Daniel F Sunday, Purnima P Balakrishnan, Thomas A Germer, Steven E Grantham, Clay Klein, Stephanie L Moffitt, Eric A Shirley, Henry C Kapteyn, Margaret M Murnane
This data set provides the measurement data from EUV diffractometry, simulated fits to these data, and parametric values and uncertainties from these fits as first reported in Barnes et al., "Lab
Created December 8, 2019, Updated August 28, 2024
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