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Yichen Shuai, Deyin Zhao, Corey A. Stambaugh, John R. Lawall, Weidong Zhou, Yonghao Liu
Abstract
We demonstrate here a surface-normal ultracompact Fano resonance electrooptic spatial light modulator employing a stacked photonic crystal membrane capacitor-like structure. Vertically coupled optical resonance near 1.5 μm was observed, and both blue and red spectral shifts were achieved by means of appropriate electrical bias. A 200-MHz modulation bandwidth was obtained on a device with an 80 μm × 80 μm mesa area, while bandwidths in the gigahertz range are expected by shrinking the mesa lateral size down to 20 μm × 20 μm. We fabricated 6 × 6 arrays with different mesa sizes on a silicon-on-insulator platform, illustrating the potential of these devices in vertically integrated photonic technologies and for high-speed spatial light modulations.
Shuai, Y.
, Zhao, D.
, Stambaugh, C.
, Lawall, J.
, Zhou, W.
and , Y.
(2017),
Coupled Bilayer Photonic Crystal Slab Electro-Optic Spatial Light Modulators, IEEE Photonics Journal, [online], https://doi.org/10.1109/JPHOT.2017.2675619
(Accessed October 9, 2025)