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PUBLICATIONS

Nanoscale 3D Shape Process Monitoring Using TSOM

Published

Author(s)

Ravikiran Attota
Proceedings Title
OSA Imaging and Applied Optics Congress
Conference Dates
June 25-28, 2018
Conference Location
Orlando, FL, US
Conference Title
Applied Industrial Optics
Pub Type
Conferences

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Keywords

nanotechnology, nanotechnology, optical metrology, TSOM, through-focus scanning optical microscopy
Optical / photometry / laser metrology, Nanotechnology, Nanometrology, Metrology and Dimensional metrology

Citation

Attota, R. (2018), Nanoscale 3D Shape Process Monitoring Using TSOM, OSA Imaging and Applied Optics Congress, Orlando, FL, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925417 (Accessed May 4, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 24, 2018, Updated April 11, 2022