Comparison measurements of low-pressure between a laser refractometer and ultrasonic manometer

Published

May 13, 2016

Author(s)

Patrick F. Egan, Jack A. Stone Jr., Jacob E. Ricker, Jay H. Hendricks

Abstract

We have developed a new low-pressure sensor which is based on the measurement of (nitrogen) gas refractivity inside a Fabry-Perot (FP) cavity. We compare pressure determinations via this laser refractometer to that of well-established ultrasonic manometers throughout the range 100 Pa to 100000 Pa. The refractometer demonstrates 10^{-6} reproducibility for p > 100 Pa, and this precision outperforms a manometer. We also claim the refractometer has an expanded uncertainty of U(p_{FP}) = [ (2.0 mPa)^2 + (8.8 x 10^{-6} p)^2 ]^1⁄2, as realized through the properties of nitrogen gas; we argue that a transfer of the pascal to p

Citation

Review of Scientific Instruments

Volume

87

Issue

5

Pub Type

Journals

Download Paper

https://doi.org/10.1063/1.4949504

Citation

Egan, P. , Stone, J. , Ricker, J. and Hendricks, J. (2016), Comparison measurements of low-pressure between a laser refractometer and ultrasonic manometer, Review of Scientific Instruments, [online], https://doi.org/10.1063/1.4949504 (Accessed October 21, 2025)