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UV Lithography: Taking Extreme Measures

Sometime soon, microchip fabricators will take the next major step in the relentless reduction of feature size, from the current minimum of 22 nm down to 10 nm

NIST FY 2012 Budget Signed Into Law

On Nov. 18, 2011, President Obama signed into law the Consolidated and Further Continuing Appropriations Act of 2012 (P.L. 112-55), which provides FY 2012