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PUBLICATIONS

Block-copolymer healing of simple defects in a chemoepitaxial template

Published

Author(s)

Paul N. Patrone, Gregg M. Gallatin

Abstract

Using a phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. The model, which is an extension of the Leibler-Ohta-Kawasaki theory, accounts for the polymer-substrate and polymer-air interactions. We derive formulas for the monomer density and the microdomain interface profile of periodic, lamellar BCP melts whose template lines are wider than the bulk microdomain width. For such systems, our analysis (i) shows that mass conservation causes the microdomain interfaces to oscillate about their bulk positions and (ii) determines the length scale over which these oscillations decay away from the substrate.
Citation
SPIE Conference Proceedings
Volume
8680
Pub Type
Journals

Download Paper

https://doi.org/10.1117/12.2011656
Manufacturing, Lithography and Self-assembly

Citation

Patrone, P. and Gallatin, G. (2013), Block-copolymer healing of simple defects in a chemoepitaxial template, SPIE Conference Proceedings, [online], https://doi.org/10.1117/12.2011656 (Accessed April 25, 2024)

Created April 11, 2013, Updated November 10, 2018