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NanoFab Tool: Bruker Dektak 6M contact profilometer

Photograph of the Bruker Dektak 6M contact profilometer.

The Bruker Dektak 6M contact profilometer measures the thickness of patterned thin films by sensing the deflections of a fine stylus riding over feature steps. It can detect depths ranging from 1 mm down to 5 nm and supports substrates ranging from 150 mm diameter wafers down to small pieces.

Specifications/Capabilities

  • Maximum step height: 1 mm.
  • Vertical resolution: 0.1 nm.
  • Scan length: 50 µm to 30 mm.
  • Stylus force: 9.8 mN to 147 mN (1 mgf to 15 mgf).

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 150 mm (6 in).
  • Small pieces supported: Yes.
  • Maximum thickness: 31 mm.

Typical Applications

  • Measurement of etch rates, deposition rates, and film growth rates.
  • Measurement of surface roughness.
  • Thickness mapping.
Created May 21, 2014, Updated November 25, 2019