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NanoFab Tool: Asylum Jupiter XR Atomic Force Microscope

Asylum Jupiter XR Atomic Force Microscope
Credit: NIST

The Asylum Jupiter XR atomic force microscope (AFM) is a large-sample AFM with both high speed data acquisition and extended range capabilities able to handle substrates up to 200 mm diameter. The Jupiter XR system has programmable stage control and a user-friendly interface to provide rapid nanoscale imaging using a cantilevered probe tip to measure surface topography.


  • Contact mode, tapping mode, and phase imaging mode.
  • Electrostatic force microscopy.
  • Magnetic force microscopy.
  • X-Y scan range: 100 μm x 100 μm.
  • Z-range: 12 μm.
  • Surface roughness measurements.
  • Electrical measurements.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Small pieces supported: Yes.

Typical Applications

  • Imaging of nanoscale materials.
  • Topographic surface characterization.
  • Non-destructive inspection of samples.
Created March 20, 2024