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NanoFab Tool: Asylum Jupiter XR Atomic Force Microscope
The Asylum Jupiter XR atomic force microscope (AFM) is a large-sample AFM with both high speed data acquisition and extended range capabilities able to handle substrates up to 200 mm diameter. The Jupiter XR system has programmable stage control and a user-friendly interface to provide rapid nanoscale imaging using a cantilevered probe tip to measure surface topography.
Specifications/Capabilities
- Contact mode, tapping mode, and phase imaging mode.
- Electrostatic force microscopy.
- Magnetic force microscopy.
- X-Y scan range: 100 μm x 100 μm.
- Z-range: 12 μm.
- Surface roughness measurements.
- Electrical measurements.
Usage Information
Supported Sample Sizes
- Maximum wafer diameter: 200 mm (8 in).
- Small pieces supported: Yes.
Typical Applications
- Imaging of nanoscale materials.
- Topographic surface characterization.
- Non-destructive inspection of samples.