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Special Tests of VUV and EUV Optics

Technical Contacts:
Robert Vest
Tel: 301-975-3992
E-mail: robert.vest [at] (robert[dot]vest[at]nist[dot]gov)

Thomas B. Lucatorto
Tel: 301-975-3734
E-mail: tlucatorto [at] (tlucatorto[at]nist[dot]gov)

Please contact the technical staff before shipping instruments or standards to the address listed below.

Mailing Address:
National Institute of Standards and Technology
100 Bureau Drive, Stop 8411
Gaithersburg, MD 20899-8411

Service ID
Description of Services Fee ($)
40602S Special Tests of VUV and EUV Optics At Cost

Fees are subject to change without notice.

Special tests of VUV and EUV optics (40602S)

Measurements of optics and detectors are made as a function of wavelength in the range of 4.5 nm to 400 nm. These measurements include specular reflectance of mirrors, diffraction efficiency of gratings, optical constants of materials, and other properties derived from reflectometry measurements. Angle of incidence for characterization can be varied from 10° to 80°. Optical components may have dimensions between 1 cm and 10 cm perpendicular to the beam and thickness up to 2 cm.  Please contact NIST staff prior to ordering to discuss the feasibility of the measurement, pricing, availability, and schedule. Arrangements for measurements on submitted test items must be made before shipment. NIST will decide whether and how to perform the measurements. Test items not accepted for measurement will be returned.

References-Detector Calibrations in the Ultraviolet

Stable Silicon Photodiodes for Absolute Intensity Measurements in the VUV and Soft X-Ray Regions, E. M. Gullikson, R. Korde, L. R. Canfield, and R. E. Vest, J. Electron Spectrosc. Relat. Phenon., 80, 313 (1996).

Far Ultraviolet Detector Standards, L. R. Canfield and N. Swanson, J. Res. Natl. Bur. Stand. (U.S.), 92 (2), 97-112 (1987).

NBS Measurement Services: Far Ultraviolet Detector Standards, L. R. Canfield and N. Swanson, Natl. Bur. Stand. (U.S.), Spec. Publ. 250-2 (June 1987).

Time response of NBS windowless XUV radiometric transfer detectors, E. B. Saloman, Appl. Opt. 14, 1764 (1975).

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Created January 8, 2018, Updated November 15, 2019