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SiO2/Si3N4/A12O3 Stacks on Silicon for Scaled-Down Memory Devices: Effects of Interfaces and Thermal Annealing: Page feedback

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SiO<sub>2</sub>/Si<sub>3</sub>N<sub>4</sub>/A1<sub>2</sub>O<sub>3</sub> Stacks on Silicon for Scaled-Down Memory Devices: Effects of Interfaces and Thermal Annealing: Page feedback