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NIST DTSA-II builds on the best available algorithms in the literature to simulate, quantify and plan energy dispersive x-ray analysis measurements.  The program implements analytical and Monte Carlo models for simulating x-ray spectra that can be compared directly to measured spectra.  The program implements the best available algorithms (including Filter-fitting and Pouchou and Pichoir’s XPP matrix correction algorithm) to provide the most accurate quantitative analysis available using energy dispersive detectors.  Finally, DTSA-II provides tools to help the analyst select the optimal standards and suitable instrument conditions to make accurate and precise measurements of composition.


Related Publication

Ritchie, N. W. M.; Newbury, D. E. & Davis, J. M., EDS Measurements of X-Ray Intensity at WDS Precision and Accuracy Using a Silicon Drift Detector Microscopy and Microanalysis, Cambridge Univ Press, 2012, 18, 892-904

Newbury, D. E. & Ritchie, N. W. M. Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS) Journal of Materials Science, {2015}, {50}, {493-518}


NIST DTSA-II is used in industrial, academic, forensic and laboratory environments.  Consistent reliable results are appreciated in industry and laboratories and the simulation and quantification are used in many graduate and undergraduate microanalysis courses.

Sample Screenshots


NIST DTSA-II with four complex Drake and Weill rare-earth containing spectra.

Created March 20, 2018, Updated November 15, 2019