NIST DTSA-II builds on the best available algorithms in the literature to simulate, quantify and plan energy dispersive x-ray analysis measurements. The program implements analytical and Monte Carlo models for simulating x-ray spectra that can be compared directly to measured spectra. The program implements the best available algorithms (including Filter-fitting and Pouchou and Pichoir’s XPP matrix correction algorithm) to provide the most accurate quantitative analysis available using energy dispersive detectors. Finally, DTSA-II provides tools to help the analyst select the optimal standards and suitable instrument conditions to make accurate and precise measurements of composition.
Software
http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html
Related Publication
Ritchie, N. W. M.; Newbury, D. E. & Davis, J. M., EDS Measurements of X-Ray Intensity at WDS Precision and Accuracy Using a Silicon Drift Detector Microscopy and Microanalysis, Cambridge Univ Press, 2012, 18, 892-904
Newbury, D. E. & Ritchie, N. W. M. Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS) Journal of Materials Science, {2015}, {50}, {493-518}
