X-Ray Microanalyses in the Variable Pressure (Environmental) Scanning Electron Microscopy

Published

December 1, 2002

Author(s)

Dale E. Newbury

Abstract

X-ray spectra measured on uncoated insulators in the low voltage scanning electron microscope (LVSEM) and the variable pressure environmental scanning electron microscope (VP-ESEM) are subject to artifacts due to charging effects despite the capability of obtaining stable SEM imaging under these conditions. Spectral features are investigated that can be used to reveal anomalous charging conditions to avoid or at least recognize such artifacts. The Duane-Hunt limit of the x-ray continuum is a valuable tool for examining the incident beam energy which responds to charging conditions, but the dynamic nature of charging can introduce time dependent effects that can mask the expected effects. Protocols are described to evaluate the charging situation and to minimize or even eliminate it while retaining the ability to examine unmodified surfaces.

Citation

Journal of Research (NIST JRES) -

Volume

107 No. 6

NIST Pub Series

Journal of Research (NIST JRES)

Pub Type

NIST Pubs

Keywords

Duane-Hunt limit, electron probe microanalysis, energy dispersive spectrometry, microbeam analysis, scanning electron microscopy, x-ray spectrometry

Citation

Newbury, D. (2002), X-Ray Microanalyses in the Variable Pressure (Environmental) Scanning Electron Microscopy, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 28, 2026)

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