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X-ray Metrology for Semiconductors

Published

Author(s)

Daniel F. Sunday, Regis J. Kline
Citation
Characterization and Metrology for Nanoelectronics
Publisher Info
Pan Stanford Publishing, Boca Raton, FL

Citation

Sunday, D. and Kline, R. (2016), X-ray Metrology for Semiconductors, Pan Stanford Publishing, Boca Raton, FL (Accessed May 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 21, 2016, Updated March 23, 2017