Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Workshop on temperature measurement of semiconductor wafers using thermocouples:

Published

Author(s)

K G Kreider, D P DeWitt, B K Tsai, B Lojek
Citation
- NIST IR 6566
Report Number
NIST IR 6566

Citation

Kreider, K. , DeWitt, D. , Tsai, B. and Lojek, B. (2001), Workshop on temperature measurement of semiconductor wafers using thermocouples:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6566 (Accessed April 14, 2024)
Created January 1, 2001, Updated May 20, 2023