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Workshop summary report ::scanning probe nanolithography workshop



John A Dagata, Hiroshi Yokoyama, Francesc Perez-Murano
- NIST IR 7040
Report Number
NIST IR 7040


Dagata, J. , Yokoyama, H. and Perez-Murano, F. (2003), Workshop summary report ::scanning probe nanolithography workshop, , National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed June 15, 2024)


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Created January 1, 2003, Updated May 20, 2023