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Workshop summary report ::scanning probe nanolithography workshop

Published

Author(s)

John A Dagata, Hiroshi Yokoyama, Francesc Perez-Murano
Citation
- NIST IR 7040
Report Number
NIST IR 7040

Citation

Dagata, J. , Yokoyama, H. and Perez-Murano, F. (2003), Workshop summary report ::scanning probe nanolithography workshop, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7040 (Accessed June 15, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2003, Updated May 20, 2023