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Wavelength Characterization of a Molecular F2 Laser at 157 nm for DUV Lithography

Published

Author(s)

Craig J. Sansonetti, Joseph Reader
Citation
Lambda Highlights
Volume
58

Citation

Sansonetti, C. and Reader, J. (2001), Wavelength Characterization of a Molecular F<sub>2</sub> Laser at 157 nm for DUV Lithography, Lambda Highlights (Accessed June 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2001, Updated February 19, 2017