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Vibrational Signatures of Polyethylene Glycol and Brighteners on Copper

Published

Author(s)

B C. Baker, Clayton S. Yang, Lee J. Richter, Thomas P. Moffat

Abstract

With the use of fourier transform infrared spectroscopy (FTIR) and sum frequency generation spectroscopy (SFG), the surface coverage and confirmation of additives often used in copper deposition are identified on copper surfaces. Ex situ experiments at open circuit and during deposition show an increase in the adsorption of brighteners such as 3-mercapto-1-propanesulfonic acid (MPSA) and bis-(3-sulfopropyl)-disulfide (SPS) with time. With an increase in the surfacecoverage of these species, a decrease in the surface coverage of PEG is noted. The trends in surface coverage and adsorption of these species have been shown for both sulfate- and perchlorate-based electrolytes. The differences in the kinetics between the adsorption of MPSA and SPS will be discussed.
Citation
Vibrational Signatures of Polyethylene Glycol and Brighteners on Copper

Keywords

brighteners, copper deposition, copper surfaces, FTIR, MPSA, polyethylene glycol, SFG, SPS

Citation

Baker, B. , Yang, C. , Richter, L. and Moffat, T. (2002), Vibrational Signatures of Polyethylene Glycol and Brighteners on Copper, Vibrational Signatures of Polyethylene Glycol and Brighteners on Copper (Accessed May 22, 2024)

Issues

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Created February 1, 2002, Updated February 17, 2017